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1

Fabrication of silicon based through-wafer interconnects for advanced chip scale packaging

Fan Ji, Seppo Leppävuori, Ismo Luusua, Kimmo Henttinen, Simo Eränen, Iiro Hietanen, Mikko Juntunen

Journal:

Sensors and Actuators A: Physical

Year:

2008

Language:

english

File:

PDF, 706 KB

english, 2008

2

MEMS on cavity-SOI wafers

Hannu Luoto, Kimmo Henttinen, Tommi Suni, James Dekker, Jari Mäkinen, Altti Torkkeli

Journal:

Solid-State Electronics

Year:

2007

Language:

english

File:

PDF, 574 KB

english, 2007

3

Low-temperature bonding of thick-film polysilicon for microelectromechanical system (MEMS)

H. Luoto, T. Suni, M. Kulawski, K. Henttinen, H. Kattelus

Journal:

Microsystem Technologies

Year:

2006

Language:

english

File:

PDF, 400 KB

english, 2006

4

Bonded thick film SOI with pre-etched cavities

Tommi Suni, Kimmo Henttinen, James Dekker, Hannu Luoto, Martin Kulawski, Jari Mäkinen, Risto Mutikainen

Journal:

Microsystem Technologies

Year:

2006

Language:

english

File:

PDF, 557 KB

english, 2006

5

Comparison of thermally and mechanically induced Si layer transfer in hydrogen-implanted Si wafers

T. Höchbauer, A. Misra, M. Nastasi, K. Henttinen, T. Suni, I. Suni, S.S. Lau, W. Ensinger

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2004

Language:

english

File:

PDF, 421 KB

english, 2004

6

Effect of interleukin-10 on NF-kB and AP-1 activities in interleukin-2 dependent CD8 T lymphoblasts

Mikko Hurme, Tiina Henttinen, Matti Karppelin, Kari Varkila, Sampsa Matikainen

Journal:

Immunology Letters

Year:

1994

Language:

english

File:

PDF, 654 KB

english, 1994

7

Fully tileable photodiode matrix for medical imaging by using through-wafer interconnects

Mikko Juntunen, Fan Ji, Kimmo Henttinen, Ismo Luusua, Iiro Hietanen, Simo Eränen

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2007

Language:

english

File:

PDF, 253 KB

english, 2007

8

Signals Leading to the Activation of NF-κB Transcription Factor are Stronger in Neonatal than Adult T Lymphocytes

S. KILPINEN, T. HENTTINEN, N. LAHDENPOHJA, J. HULKKONEN, M. HURME

Journal:

Scandinavian Journal of Immunology

Year:

1996

Language:

english

File:

PDF, 1.15 MB

english, 1996

9

Activation of the Protein Kinase A Increases the DNA-Binding and Transcriptional Activity of c-Rel in T Cells

N. LAHDENPOHJA, T. HENTTINEN, M. HURME

Journal:

Scandinavian Journal of Immunology

Year:

1996

Language:

english

File:

PDF, 517 KB

english, 1996

10

Removal of cell surface heparan sulfate increases TACE activity and cleavage of ErbB4 receptor

Jorma A Määttä, Kaisa Olli, Tiina Henttinen, Minna T Tuittila, Klaus Elenius, Markku Salmivirta

Journal:

BMC Cell Biology

Year:

2009

Language:

english

File:

PDF, 1.51 MB

english, 2009

11

Influence of hydrogen dose and boron doping on the ion cutting of Si

A. Nurmela, K. Henttinen, T. Suni, I. Suni

Journal:

Surface and Interface Analysis

Year:

2003

Language:

english

File:

PDF, 100 KB

english, 2003

12

Regulation of proliferation of UM-SCV-1A and UM-SCV-6 vulvar carcinoma cells by cytokines

K. Vihko, Marjo Seppänen, Tiina Henttinen, Juha Punnonen, Seija Grénman, Reijo Punnonen

Journal:

Cancer Immunology, Immunotherapy

Year:

1997

Language:

english

File:

PDF, 223 KB

english, 1997

13

Vimentin function in lymphocyte adhesion and transcellular migration

Nieminen, Mikko, Henttinen, Tiina, Merinen, Marika, Marttila–Ichihara, Fumiko, Eriksson, John E., Jalkanen, Sirpa

Journal:

Nature Cell Biology

Year:

2006

Language:

english

File:

PDF, 1.00 MB

english, 2006

14

Ectopic Expression of Syndecan-1 in Basal Epidermis Affects Keratinocyte Proliferation and Wound Re-Epithelialization

Ojeh, Nkemcho, Hiilesvuo, Katri, Wärri, Anni, Salmivirta, Markku, Henttinen, Tiina, Määttä, Arto

Journal:

The Journal of Investigative Dermatology

Year:

2007

Language:

english

File:

PDF, 1.65 MB

english, 2007

15

Ion beam studies of hydrogen implanted Si wafers

A. Nurmela, K. Henttinen, T. Suni, A. Tolkki, I. Suni

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2004

Language:

english

File:

PDF, 335 KB

english, 2004

16

Cold ion-cutting of hydrogen implanted Si

K. Henttinen, T. Suni, A. Nurmela, I. Suni, S.S. Lau, T. Höchbauer, M. Nastasi, V.-M. Airaksinen

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2002

Language:

english

File:

PDF, 308 KB

english, 2002

17

The use of ion channeling and elastic recoil detection in determining the mechanism of cleavage in the ion-cut process

T. Höchbauer, M. Nastasi, R.D. Verda, A. Misra, K. Henttinen, I. Suni, S.S. Lau, J.W. Mayer

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2002

Language:

english

File:

PDF, 179 KB

english, 2002

18

Mini-PEG spacering of VAP-1-targeting68Ga-DOTAVAP-P1 peptide improves PET imaging of inflammation

Anu Autio, Tiina Henttinen, Henri J Sipilä, Sirpa Jalkanen, Anne Roivainen

Journal:

EJNMMI Research

Year:

2011

Language:

english

File:

PDF, 795 KB

english, 2011

19

Effects of Plasma Activation on Hydrophilic Bonding of Si and SiO[sub 2]

Suni, T., Henttinen, K., Suni, I., Mäkinen, J.

Journal:

Journal of The Electrochemical Society

Year:

2002

Language:

english

File:

PDF, 340 KB

english, 2002

20

Xuejie Shi,, Henttinen, K., Suni, T., Suni, I., Lau, S.S., Man Wong,

Journal:

IEEE Electron Device Letters

Year:

2003

Language:

english

File:

PDF, 242 KB

english, 2003

21

Direct Bonding of Thick Film Polysilicon to Glass Substrates

Luoto, H., Suni, T., Henttinen, K., Kulawski, M.

Journal:

Journal of The Electrochemical Society

Year:

2006

Language:

english

File:

PDF, 613 KB

english, 2006

22

Syndecan-1 regulates FGF8b responses in S115 mammary carcinoma cells

Viklund, Leif, Vorontsova, Natalia, Henttinen, Tiina, Salmivirta, Markku

Journal:

Year:

2006

Language:

english

File:

PDF, 303 KB

english, 2006

23

[IEEE IEEE/SEMI Conference and Workshop on Advanced Semiconductor Manufacturing 2005. - Munich, Germany (11-12 April 2005)] IEEE/SEMI Conference and Workshop on Advanced Semiconductor Manufacturing 2005. - Polishing of bulk micro-machined substrates by fixed abrasive pads for smoothing and planarization of MEMS structures

Martin Kulawski,, Hannu Luoto,, Kimmo Henttinen,, Tommi Suni,, Frauke Weimar,, Jari Makinen,

Year:

2005

Language:

english

File:

PDF, 1.07 MB

english, 2005

24

Mechanically induced Si layer transfer in hydrogen-implanted Si wafers

Henttinen, K., Suni, I., Lau, S. S.

Journal:

Applied Physics Letters

Year:

2000

Language:

english

File:

PDF, 421 KB

english, 2000

25

Microwave-cut silicon layer transfer

Thompson, D. C., Alford, T. L., Mayer, J. W., Hochbauer, T., Nastasi, M., Lau, S. S., Theodore, N. David, Henttinen, K., Suni, llkka, Chu, Paul K.

Journal:

Applied Physics Letters

Year:

2005

Language:

english

File:

PDF, 383 KB

english, 2005

26

Multiscale modeling of fluid turbulence and flocculation in fiber suspensions

A. Jafari, P. Zamankhan, S. M. Mousavi, K. Henttinen

Year:

2006

Language:

english

File:

PDF, 917 KB

english, 2006

27

Erratum: “Mechanically induced Si layer transfer in hydrogen implanted Si wafers” [Appl. Phys. Lett. 76, 2370 (2000)]

K. Henttinen, I. Suni, S. S. Lau

Year:

2000

Language:

english

File:

PDF, 270 KB

english, 2000

28

Gate bias symmetry dependency of electron mobility and prospect of velocity modulation in double-gate silicon-on-insulator transistors

Prunnila, M., Ahopelto, J., Henttinen, K., Gamiz, F.

Journal:

Applied Physics Letters

Year:

2004

Language:

english

File:

PDF, 460 KB

english, 2004

29

Silicon layer transfer using plasma hydrogenation

Chen, Peng, Lau, S. S., Chu, Paul K., Henttinen, K., Suni, T., Suni, I., Theodore, N. David, Alford, T. L., Mayer, J. W., Shao, Lin, Nastasi, M.

Journal:

Applied Physics Letters

Year:

2005

Language:

english

File:

PDF, 358 KB

english, 2005

30

Single crystal Si layers on glass formed by ion cutting

Cai, M., Qiao, D., Yu, L. S., Lau, S. S., Li, C. P., Hung, L. S., Haynes, Tony E., Henttinen, K., Suni, Ilkka, Poon, V. M. C., Marek, T., Mayer, J. W.

Journal:

Journal of Applied Physics

Year:

2002

Language:

english

File:

PDF, 523 KB

english, 2002

31

Fabrication and electrical characterization of high aspect ratio poly-silicon filled through-silicon vias

Dixit, Pradeep, Vehmas, Tapani, Vähänen, Sami, Monnoyer, Philippe, Henttinen, Kimmo

Journal:

Journal of Micromechanics and Microengineering

Year:

2012

Language:

english

File:

PDF, 2.41 MB

english, 2012

32

Characteristics of transistors fabricated on silicon-on-quartz prepared using a mechanically initiated exfoliation technique

Xuejie Shi,, Henttinen, K., Suni, T., Suni, I., Man Wong,

Journal:

IEEE Electron Device Letters

Year:

2005

Language:

english

File:

PDF, 142 KB

english, 2005

33

Photocurrent method for characterizing the interface of hydrophobically bonded Si wafers

Yu, L. S., Mages, P., Qiao, D., Jia, L., Yu, P. K. L., Lau, S. S., Suni, T., Henttinen, K., Suni, I.

Journal:

Applied Physics Letters

Year:

2003

Language:

english

File:

PDF, 349 KB

english, 2003

34

The oxidase activity of vascular adhesion protein-1 (VAP-1) induces endothelial E- and P-selectins and leukocyte binding

Jalkanen, S., Karikoski, M., Mercier, N., Koskinen, K., Henttinen, T., Elima, K., Salmivirta, K., Salmi, M.

Journal:

Year:

2007

Language:

english

File:

PDF, 288 KB

english, 2007

35

Genome-Wide Identification of Novel Genes Involved in Early Th1 and Th2 Cell Differentiation

Lund, R. J., Loytomaki, M., Naumanen, T., Dixon, C., Chen, Z., Ahlfors, H., Tuomela, S., Tahvanainen, J., Scheinin, J., Henttinen, T., Rasool, O., Lahesmaa, R.

Journal:

The Journal of Immunology

Year:

2007

Language:

english

File:

PDF, 306 KB

english, 2007

36

Silicon-on-Insulator Wafers with Buried Cavities

Suni, T., Henttinen, K., Dekker, J., Luoto, H., Kulawski, M., Mäkinen, J., Mutikainen, R.

Journal:

Journal of The Electrochemical Society

Year:

2006

Language:

english

File:

PDF, 379 KB

english, 2006

37

Advances in the CMP Process on Fixed Abrasive Pads for the Polishing of SOISubstrates with High Degree of Flatness

Kulawski, Martin, Luoto, Hannu, Henttinen, Kimmo, Suni, Ilkka, Weimar, Frauke, Mäkinen, Jari

Journal:

MRS Proceedings

Year:

2004

Language:

english

File:

PDF, 639 KB

english, 2004

38

IFN- Induced Adenosine Production on the Endothelium: A Mechanism Mediated by CD73 (Ecto-5'-Nucleotidase) Up-Regulation

Niemela, J., Henttinen, T., Yegutkin, G. G., Airas, L., Kujari, A.-M., Rajala, P., Jalkanen, S.

Journal:

The Journal of Immunology

Year:

2004

Language:

english

File:

PDF, 561 KB

english, 2004

39

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Direct Bonding of Oxidized Cavity Wafers

Palokangas, Martti O., Dekker, James, Henttinen, Kimmo, Mäkinen, Jari

Year:

2008

Language:

english

File:

PDF, 903 KB

english, 2008

40

Adherent Leukocytes Prevent Adenosine Formation and Impair Endothelial Barrier Function by Ecto-5'-nucleotidase/CD73-dependent Mechanism

Henttinen, T., Jalkanen, S., Yegutkin, G. G.

Journal:

Journal of Biological Chemistry

Year:

2003

Language:

english

File:

PDF, 793 KB

english, 2003

41

[ECS 209th ECS Meeting - Denver, Colorado (May 7-May 12, 2006)] ECS Transactions - Fabrication and Characterization of IC Compatible Through-Wafer Polysilicon Interconnects

Luusua, Ismo, Henttinen, Kimmo, Pekko, Panu, Vehmas, Tapani

Year:

2007

Language:

english

File:

PDF, 275 KB

english, 2007

42

Novel Heparan Sulfate Structures Revealed by Monoclonal Antibodies

van den Born, J., Salmivirta, K., Henttinen, T., Ostman, N., Ishimaru, T., Miyaura, S., Yoshida, K., Salmivirta, M.

Journal:

Journal of Biological Chemistry

Year:

2005

Language:

english

File:

PDF, 441 KB

english, 2005

43

Tubulin- and actin-associating GIMAP4 is required for IFN-γ secretion during Th cell differentiation

Heinonen, Mirkka T, Kanduri, Kartiek, Lähdesmäki, Harri J, Lahesmaa, Riitta, Henttinen, Tiina A

Journal:

Immunology & Cell Biology

Year:

2015

Language:

english

File:

PDF, 2.27 MB

english, 2015

44

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Bonding of ALD Alumina for Advanced SOI Substrates

Suni, Tommi, Puurunen, Riikka L., Ylivaara, Oili, Kattelus, Hannu, Henttinen, Kimmo, Ishida, Tadashi, Fujita, Hiroyuki

Year:

2010

Language:

english

File:

PDF, 496 KB

english, 2010

45

Strain and electrical characterization of metal-oxide-semiconductor field-effect transistor fabricated on mechanically and thermally transferred silicon on insulator films

F. Lu, J. Bickford, C. Novotny, P. K. L. Yu, S. S. Lau, K. Henttinen, T. Suni, I. Suni

Year:

2004

Language:

english

File:

PDF, 711 KB

english, 2004

46

GIMAP GTPase Family Genes: Potential Modifiers in Autoimmune Diabetes, Asthma, and Allergy

Heinonen, M. T., Laine, A.-P., Soderhall, C., Gruzieva, O., Rautio, S., Melen, E., Pershagen, G., Lahdesmaki, H. J., Knip, M., Ilonen, J., Henttinen, T. A., Kere, J., Lahesmaa, R.

Journal:

The Journal of Immunology

Year:

2015

Language:

english

File:

PDF, 633 KB

english, 2015

47

Handbook of Silicon Based MEMS Materials and Technologies || Silicon Direct Bonding

Henttinen, Kimmo

Year:

2015

Language:

english

File:

PDF, 1.51 MB

english, 2015

48

Wafer Scale Packaging of MEMS by Using Plasma-Activated Wafer Bonding

Suni, T., Henttinen, K., Lipsanen, A., Dekker, J., Luoto, H., Kulawski, M.

Journal:

Journal of The Electrochemical Society

Year:

2006

Language:

english

File:

PDF, 781 KB

english, 2006

49

[IEEE 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Beijing, China (Oct. 18-21, 2004)] Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Single-crystalline silicon thin-film transistor on glass

Xuejie Shi,, Man Wong,, Henttinen, K., Suni, T., Suni, I., Lau, S.S.

Year:

2004

Language:

english

File:

PDF, 788 KB

english, 2004

50

Orientation and Boron Concentration Dependence of Si Layer Transfer by Mechanical Exfoliation

Henttinen, Kimmo, Suni, Tommi, Nurmela, Arto, Airaksinen, Veli-Matti, Suni, Ilkka, Lau, S.S

Journal:

MRS Proceedings

Year:

2001

Language:

english

File:

PDF, 70 KB

english, 2001